Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1996-03-04
1998-03-17
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
216 13, 216 17, H01J 902
Patent
active
057279772
ABSTRACT:
A process for manufacturing of a field emission device (100, 200) including the steps of i) providing a substrate (101, 201), ii) forming a conductive row (106, 206), ii) forming a dielectric layer (102, 202), iv) forming a resist layer (116, 216), v) forming a self-assembled monolayer (112, 212) of a self-assembled monolayer-forming molecular species on the resist layer (116, 216) so that the self-assembled monolayer (112, 212) defines an etch pattern for an emitter well (107, 207), vi) etching the resist layer (116, 216), vii) etching the dielectric layer ((102, 202), viii) forming conductive column (103, 203), and ix) forming the electron-emitter structure (105, 208) within the emitter well (107, 207).
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patent: 5233263 (1993-08-01), Cronin et al.
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patent: 5514501 (1996-05-01), Tarlov
patent: 5616061 (1997-04-01), Potter
patent: 5618760 (1997-04-01), Soh et al.
Dworsky Lawrence N.
Goronkin Herbert
Maracas George N.
Tobin Kathleen
Motorola Inc.
Parsons Eugene A.
Ramsey Kenneth J.
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