Metal working – Electric condenser making – Solid dielectric type
Reexamination Certificate
2006-11-28
2006-11-28
Kim, Paul D (Department: 3729)
Metal working
Electric condenser making
Solid dielectric type
C029S595000, C029S846000, C029S857000, C029S885000, C073S715000, C073S718000, C073S724000, C361S283400, C361S821000, C156S062200, C156S089110, C156S089150, C264S605000, C264S650000, C264S662000, C427S127000, C427S128000
Reexamination Certificate
active
07140085
ABSTRACT:
A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.
REFERENCES:
patent: 4340436 (1982-07-01), Dubetsky et al.
patent: 5026672 (1991-06-01), Bayard
patent: 5188780 (1993-02-01), Lange et al.
patent: 5436795 (1995-07-01), Bishop et al.
patent: 5553502 (1996-09-01), Hsieh
patent: 5830767 (1998-11-01), Bauman et al.
patent: 5874162 (1999-02-01), Bastian et al.
patent: 5893954 (1999-04-01), Nanataki et al.
patent: 5932043 (1999-08-01), Bates et al.
patent: 6017645 (2000-01-01), Tailhades et al.
patent: 6049158 (2000-04-01), Takeuchi et al.
patent: 0 009 313 (1979-08-01), None
patent: 0 649 008 (1994-10-01), None
patent: 2 071 853 (1981-09-01), None
patent: 2 124 770 (1984-02-01), None
patent: 54141587 (1979-02-01), None
patent: 01204022 (1989-08-01), None
“A dual frequency range integrated circuit accelerometer using capacitive and piezelectric sensing techniques”; Blow, B.A.; Harjani, R.; Polla, D.L.; Tamagawa, T.; Circuits and Systems, 1993., ISCAS '93, 1993 on May 3-6, 1993; pp. 1120-1123.
Bjoerkman Per
Olsson Ray
Cahill von Hellens & Glazer, P.L.C.
Inficon GmbH
Kim Paul D
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