Process for making thin polymer film by pulsed laser evaporation

Details Process for making thin polymer film by pulsed laser evaporation Process for making thin polymer film by pulsed laser evaporation

1992-07-22

1993-03-09

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Electromagnetic or particulate radiation utilized

4272551, 4272556, 427294, B05D 306

Patent

active

051925800

ABSTRACT:
A process for producing thin film of a first addition polymer on a substrate comprising bombarding a target, consisting essentially of a second addition polymer, with radiation from a pulsed laser in a vacuum or gas atmosphere to form a plume of components of said second polymer; and depositing said plume on a substrate, whereby a film of said first polymer is formed. The first and second addition polymer may be identical or different and in both cases may be fluoropolymer.

REFERENCES:
patent: 4915981 (1990-04-01), Traskos et al.
Mihailov et al., J. Appl. Phys. 69 (7), pp. 4092-4102 (1991).
Dijkkamp et al., Appl. Phys. Lett. 51 (8), pp. 619-621 (1987).
Rimai et al., Appl. Phys. Lett. 59 (18), pp. 2266-2268 (1991).
Znotins, Solid State Technology, pp. 99-104 (1986).

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