Process for making thermostable coating materials

Details Process for making thermostable coating materials Process for making thermostable coating materials

1994-05-27

1995-09-19

Bleutge, John C.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 38, 427 96, 427387, 428447, C08G 7726

Patent

active

054516552

ABSTRACT:
Thermostable compounds are prepared by mixing perylene dianhydride with one or more aminosilanes in a molar ratio of 1:4 in an inert solvent, and the aminosilanes may comprise aminoalkylakoxysilanes. Upon heating the mixture a thermostable coating is formed. Prior to heating the mixture may be spin-applied to a substrate. The coating may be used in semiconductor device fabrication as the mixture has good spin-on characteristics with the cured compound being thermally stable over 600.degree. C. and having good etch characteristics.

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patent: 5002831 (1991-03-01), Plueddemann
patent: 5021585 (1991-06-01), Dougherty et al.
patent: 5036145 (1991-07-01), Echterling et al.

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