Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate
2007-08-14
2007-08-14
Alanko, Anita (Department: 1765)
Etching a substrate: processes
Forming or treating optical article
C216S041000, C216S049000, C216S056000, C216S075000, C438S029000, C430S269000, C430S296000, C430S321000, C385S131000, C359S237000
Reexamination Certificate
active
10504518
ABSTRACT:
A process for making photonic crystal circuit and a photonic crystal circuit consisting of regularly-distributed holes in a high index dielectric material, and controllably-placed defects within this lattice, creating waveguides, cavities, etc. for photonic devices. The process is based upon the discovery that some positive ultraviolet (UV) photoresists are electron beam sensitive and behave like negative electron beam photoresists. This permits creation of photonic crystal circuits using a combination of electron beam and UV exposures. As a result, the process combines the best features of the two exposure methods: the high speed of UV exposure and the high resolution and control of the electron beam exposure. The process also eliminates the need for expensive photomasks.
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Murakowski Janusz
Prather Dennis W.
Alanko Anita
Connolly Bove & Lodge & Hutz LLP
University of Delaware
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