Process for making microdevice with movable microplatform

Details Process for making microdevice with movable microplatform Process for making microdevice with movable microplatform

2005-02-01

2005-02-01

Nguyen, Nam (Department: 1753)

Electrolysis: processes, compositions used therein, and methods

Electroforming or composition therefor

Mirror or reflector

C205S067000, C205S078000, C205S079000, C205S122000

Reexamination Certificate

active

06849170

ABSTRACT:
A process for making a microdevice that includes the steps of providing a base member and selectively electroforming a support member for supporting a microplatform with respect to the base member. The process also includes the steps of selectively electroforming the microplatform and forming a flexible hinge member for hingedly connecting the microplatform to the support member and allowing relative movement of the microplatform with respect to the support member. This microdevice, when compared to prior art devices, can have improved mechanical strength, rigidity, low deformation, and high planarity.

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