Process for making microcomponents integrated circuits

Details Process for making microcomponents integrated circuits Process for making microcomponents integrated circuits

1992-03-31

1994-01-18

Maples, John S.

Fishing, trapping, and vermin destroying

437192, 437194, 437978, H01L 21441

Patent

active

052799883

ABSTRACT:
A process for fabricating discrete electrical microcomponents, such as microtransformers, microautotransformers and microinductors, on a semiconductor substrate in which two patterned layers of electrically conductive material are electrically connected through vias in two interposed layers of electrically insulating material to form electrically conductive coils around a magnetic core formed by a patterned layer of magnetic material interposed between the two insulating layers. Laminated magnetic cores may be formed by patterning multiple layers of magnetic material. The microcomponents can also be formed without magnetic cores and can be formed on insulating substrates.

REFERENCES:
patent: 4407859 (1983-10-01), Jones
patent: 4764484 (1988-08-01), Mo
patent: 5063175 (1991-11-01), Broadbent
"Transformers For Electronic Circuits", Second Edition, Nathan R. Grossner and Isabel S. Grossner, McGraw-Hill Book Company, New York, 1983, pp. 1-6.
"Magnetic Materials", F. Brailsford, John Wiley & Sons, Inc., New York, Section 1.3 (pp. 12-15 and Chapter VII (pp. 160-181) (no date available).

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