Process for making josephson junctions

Details Process for making josephson junctions Process for making josephson junctions

1995-02-24

1996-12-10

King, Roy V.

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

427526, 427 62, 427 63, 505832, 505817, 505874, H01L 3924

Patent

active

055828779

ABSTRACT:
A process for fabricating the Josephson junction includes the steps of preparing a substrate, forming a first superconducting layer, forming a second superconducting layer transversely on the first layer with an insulating layer interposed therebetween wherein the insulating layer is an oxide or nitride of the superconducting material, and injecting ion beams into the insulating layer so as to form low oxygen- or nitrogen-concentrated area linking the first and second layers.

REFERENCES:
patent: 4412902 (1983-11-01), Michikami et al.
patent: 4430790 (1984-02-01), Ohta
patent: 4490901 (1985-01-01), Clark et al.
patent: 5100694 (1992-03-01), Hunt et al.

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