Process for making ink jet heater chips

Details Process for making ink jet heater chips Process for making ink jet heater chips

1996-04-08

1998-12-01

Burn, Brian M.

Incremental printing of symbolic information

Ink jet

Ejector mechanism

257379, 257537, 347 64, B41J 205, H01L 2976, H01L 2900

Patent

active

058445862

ABSTRACT:
A process is disclosed for fabricating a thermal inkjet printhead in which the driving circuitry and heating resistors are incorporated in a single integrated circuit. In the process, a protective cavitation layer, which may contain tantalum, is deposited at the locations of the heating regions over a passivation layer and is then patterned prior to any patterning or etching of the passivation layer. A via is then formed in the passivation layer.

REFERENCES:
patent: 5122812 (1992-06-01), Hess et al.
patent: 5159353 (1992-10-01), Fasen et al.

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