Process for making high temperature superconducting oxide films

Details Process for making high temperature superconducting oxide films Process for making high temperature superconducting oxide films

1995-04-05

1996-01-30

Weisstuch, Aaron

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Coating

20419224, 505476, 505731, H01L 3924, C23C 1434

Patent

active

054880319

ABSTRACT:
A process for making high temperature superconducting oxide films comprising using a sintered body of Y-Ba-Cu-O or Bi-Sr-Ca-Cu-O oxide as a sputtering target and using a mixture of argon and oxygen as a sputtering gas, forming glow discharge between the substrate and the target under a pressure of 0.5-2.5 torr and at a sputtering current density of 5-35 mA/cm.sup.2, and then cooling the substrate after the oxide film has been grown to a desired thickness. The critical temperature of the in-situ produced superconducting oxide film of Y-Ba-Cu-O is 90 K and that of Ba-Sr-Ca-Cu-O is 80 K.
An apparatus for the preparation of high temperature superconducting oxide films is also provided. The apparatus for in-situ making such high temperature superconducting oxide film is easy to heat the substrate and control its temperature without problems of conventional deposition methods.

REFERENCES:
patent: 5154811 (1992-10-01), Nishibori
R. J. Lin et al., "In situ growth of superconducting YBa.sub.2 Cu.sub.3 O.sub.3-x thin films by a hot-wall sputtering process", Appl. Phys. Lett., vol. 62, No. 1, Jan. 1993, pp. 105-107.

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