Process for making electronic device

Details Process for making electronic device Process for making electronic device

1994-10-27

1996-03-19

Sheehan, John

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 2, 228205, B08B 312

Patent

active

054996686

ABSTRACT:
Oxide films, and residues of organic matters, carbons, if any, are removed from a metal surface simply without using complicated steps and without giving adverse effects on electronic parts or electronic devices by irradiating the metal surface with a laser beam of lower energy level than energy capable of changing the metal surface structure, thereby cleaning the metal surface.

REFERENCES:
patent: 4898650 (1990-02-01), Wu et al.
patent: 5024968 (1991-01-01), Engelsberg
patent: 5151135 (1992-09-01), Magee et al.
patent: 5328517 (1994-07-01), Cates et al.

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