Process for making diamond, doped diamond, diamond-cubic boron n

Details Process for making diamond, doped diamond, diamond-cubic boron n Process for making diamond, doped diamond, diamond-cubic boron n

1987-08-19

1989-03-28

Pianalto, Bernard

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

B05D 306

Patent

active

048162914

ABSTRACT:
A process and apparatus that may be used for the production of diamond and doped diamond films at high rates by activated reactive vapor deposition. Carbon is evaporated in a vacuum chamber in the presence of atomic hydrogen containing plasma to form diamond precursors which then deposit on a substrate located within the vacuum chamber.

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