Process for making composite films

Details Process for making composite films Process for making composite films

1996-12-03

1999-11-02

King, Roy V.

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

427255394, 427255395, 42725518, 427569, 427579, C23C 1600

Patent

active

059766239

ABSTRACT:
The present invention is directed to a process for forming composite films. The films are formed on a substrate by directing a gas containing reactant species onto the substrate. The composite film is formed from an interaction between two reactant species. At least a portion of the substrate remains within the purview of the plasma discharge while the composite film is formed on the substrate.

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