Process for making a transmission mask

Details Process for making a transmission mask Process for making a transmission mask

1986-11-13

1988-10-25

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430296, 430321, 430323, 430324, 430329, 430331, 430394, 430966, 378 34, 378 35, 156643, G03F 900, G03C 500, G21K 500

Patent

active

047803827

ABSTRACT:
The invention is a process for making a transmission mask which can be used in structuring a semiconductor substrate in an additive or subtractive way by two galvanic depositions of layers of which one provides the mask structure and the other a grid structure covering the openings in the mask structure. The thickness of the structure is freely selectable self-adjusting (within the limits of the known engineering methods). The aim is the production of a transmission mask with a constant effective thickness above the mask surface.

REFERENCES:
patent: 4387145 (1983-06-01), Lehrer et al.
patent: 4448865 (1984-05-01), Bohlen et al.
patent: 4451544 (1984-05-01), Kawabuchi
patent: 4497884 (1985-02-01), Schmidt et al.

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