Process for making a late programming enhanced contact ROM

Details Process for making a late programming enhanced contact ROM Process for making a late programming enhanced contact ROM

1981-05-28

1982-11-16

Ozaki, G.

Metal working

Method of mechanical manufacture

Assembling or joining

29576B, 29578, 148187, H01L 2172

Patent

active

043588891

ABSTRACT:
A method of making a ROM and a two-level polycrystalline silicon RAM on a chip and encoding the ROM in later stages of the method, without adding a mask to the method. The mask used to define the second level of polycrystalline silicon for the RAM is also used to provide an ion implant mask for the ROM.

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patent: 4295209 (1981-10-01), Donley
patent: 4317690 (1982-03-01), Koomen et al.

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