Process for making a FBAR bandpass filter

Details Process for making a FBAR bandpass filter Process for making a FBAR bandpass filter

2011-08-16

2011-08-16

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S025350, C029S025410, C029S602100, C216S040000

Reexamination Certificate

active

07996984

ABSTRACT:
A duplexer includes an FBAR band pass filter that can be easily embodied in single chip. A method for manufacturing the same includes the steps of forming a plurality of recesses in a substrate, forming an insulation layer on the substrate, and forming a plurality of filling-up layers that fill the recesses. The method also includes the step of forming a transmitting bandpass filter and forming a receiving bandpass filter on an upper side of the membrane, with each bandpass filter including at least two film bulk acoustic resonators (FBARs). In addition, the method includes the step of forming a circuit that connects the bandpass filters to an antenna terminal, with this circuit including at least one inductor and capacitor. The method also includes a step of removing the filling-up layers from the recesses in the substrate.

REFERENCES:
patent: 5789845 (1998-08-01), Wadaka et al.
patent: 6262637 (2001-07-01), Bradley et al.
patent: 6297580 (2001-10-01), Takayama et al.
patent: 6313715 (2001-11-01), Bergmann et al.
patent: 6377137 (2002-04-01), Ruby
patent: 6407649 (2002-06-01), Tikka et al.
patent: 6486751 (2002-11-01), Barber et al.
patent: 6509813 (2003-01-01), Ella et al.
patent: 06224678 (1994-08-01), None
patent: 20020037070 (2002-05-01), None

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