Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating
Patent
1993-07-12
1995-07-11
King, Roy V.
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Coating
505480, 505238, 505732, 427 62, 427596, 4274192, 4274193, B05D 306, B05D 512
Patent
active
054321514
ABSTRACT:
A process for depositing a biaxially aligned intermediate layer over a non-single crystal substrate is disclosed which permits the subsequent deposition thereon of a biaxially oriented superconducting film. The process comprises depositing on a substrate by laser ablation a material capable of being biaxially oriented and also capable of inhibiting the migration of substrate materials through the intermediate layer into such a superconducting film, while simultaneously bombarding the substrate with an ion beam. In a preferred embodiment, the deposition is carried out in the same chamber used to subsequently deposit a superconducting film over the intermediate layer. In a further aspect of the invention, the deposition of the superconducting layer over the biaxially oriented intermediate layer is also carried out by laser ablation with optional additional bombardment of the coated substrate with an ion beam during the deposition of the superconducting film.
REFERENCES:
Berdahl, P., et al., "Angular Magnetoresistance Provides Texture Information on High-T.sub.c Conductors", Physica C, 195, 1992, pp. 93-102.
Bradley, Mark R., et al., "Theory of Thin-Film Orientation by Ion Bombardment during Deposition", J. Appl. Phys., 60 (12), 15 Dec. 1986, pp. 4160-4164.
Dimos, D., et al., "Superconducting Transport Properties of Grain Boundaries in YBa.sub.2 Cu.sub.3 O.sub.7 Bicrystals", Physical Review B, vol. 41, No. 7, Mar. 1, 1990, pp. 4038-4049.
Fork, D. K., et al., "High Critical Currents in Strained Epitaxial YBa.sub.2 Cu.sub.3 O.sub.7-.delta. on Si", Appl. Phys. Lett. 57(11), 10 Sep. 1990, pp. 1161-1163.
Garrison, S. M., et al., "Observation of Two In-Plane Epitaxial States in YBa.sub.2 Cu.sub.3 O.sub.7-.delta. Films on Yttria-Stabilized ZrO.sub.2 ", Appl. Phys. Lett. 58 (19), 13 May 1991, pp. 2168-2170.
Iijima, Y., et al., "Biaxially Aligned YSZ Buffer Layer on Polycrystalline Substrates", paper prepared for Proceedings of the Fourth International Symposium on Superconductivity, Tokyo, Japan, Oct. 14-17, 1991, pp. 1-4.
Iijima, Y., et al., "In-Plane Aligned YBa.sub.2 Cu.sub.3 O.sub.7-x Thin Films Deposited on Polycrystalline Metallic Substrates", Appl. Phys. Lett. 60 (6), 10 Feb. 1992, pp. 769-771.
Jia, Q. X., et al., "Sputter Deposition of YBa.sub.2 Cu.sub.3 O.sub.7-x Films on Si at 500.degree. C. with Conducting Metallic Oxide as a Buffer Layer", Appl. Phys. Lett. 57 (3), 16 Jul. 1990, pp. 304-306.
Kumar, Ashok, et al., "Synthesis of Superconducting YBa.sub.2 Cu.sub.3 O.sub.7-.delta. Thin Films on Nickel-Based Superalloy Using In Situ Pulsed Laser Deposition", Appl. Phys. Lett. 57 (24), 10 Dec. 1990, pp. 2594-2596.
Narumi, E., et al., "Critical Current Density Enhancement in YBa.sub.2 Cu.sub.3 O.sub.6.8 Films on Buffered Metallic Substrates", Appl. Phys. Lett. 58 (11), 18 Mar. 1991, pp. 1202-1204.
Norton, David P., et al., "High Critical Current Densities in YBa.sub.2 Cu.sub.3 O.sub.7-x Films on Polycrystalline Zirconia", Appl. Phys. Lett. 57 (11), 10 Sep. 1990, pp. 1164-1166.
Reade, R. P., et al., "Characterization of Y-Ba-Cu-O Thin Films and Yttria-Stabilized Zirconia Intermediate Layers on Metal Alloys Grown by Pulsed Laser Deposition", Appl. Phys. Lett. 59 (6), 5 Aug. 1991, pp. 739-741.
Reade, R. P., et al., "Laser Deposition of Biaxially Textured Yttria-Stabilized Zirconia Buffer Layers on Polycrystalline Metallic Alloys for High Critical Current Y-Ba-Cu-O Thin Films", Appl. Phys. Lett. 61 (18), 2 Nov. 1992, pp. 2231-2233.
Russo, R. E., et al., "Fabrication and Characterization of Y-Ba-Cu-O Thin-Films on Stainless-Steel Substrates", submitted by authors for publication in High Temperature Superconducting Compounds II, edited by S. H. Whang (Minerals, Metals, and Materials Society, Warrendale), 1990, pp. 1-6.
Russo, R. E., et al., "Metal Buffer Layers and Y-Ba-Cu-O Thin-Films on Pt and Stainless-Steel Using Pulsed Laser Deposition", J. Appl. Phys. 68 (3), 1 Aug. 1990, pp. 1354-1356.
Tiwari, P., et al., "In Situ Single Chamber Laser Processing of YBa.sub.2 Cu.sub.3 O.sub.7-.delta. Superconducting Thin Films on Si (100) with Yttria-Stabilized Zirconia Buffer Layers", Appl. Phys. Lett. 57 (15), 8 Oct. 1990, pp. 1578-1580.
Reade et al., "Biaxially-textured YBa.sub.2 Cu.sub.3 O.sub.7-x thin film growth on polycrystalline and amophorous substrates using ion-assisted laser deposition of YSZ intermediate layers", MRS vol. 258, 1993, pp. 281-286.
Iijima et al., "In-plane texturing control of Y-Ba-Cu"O thin films on polycrystalline substrates by ion-beam-modified intermediate buffer layers", IEEE Transactions on Applied Superconductivity vol. 3, No. 1, Pt. 3, pp. 1510-1515, Mar. 1993.
Berdahl Paul
Garrison Stephen M.
Reade Ronald P.
Russo Richard E.
King Roy V.
Martin Paul R.
Regents of the University of California
Taylor John P.
LandOfFree
Process for ion-assisted laser deposition of biaxially textured does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process for ion-assisted laser deposition of biaxially textured , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for ion-assisted laser deposition of biaxially textured will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-503470