Process for improving yield of DFB lasers

Details Process for improving yield of DFB lasers Process for improving yield of DFB lasers

2005-04-12

2005-04-12

Everhart, Caridad (Department: 2825)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S032000, C438S042000, C257S095000, C372S096000

Reexamination Certificate

active

06878565

ABSTRACT:
A distributed feedback (DFB) laser is constructed such that a laser stripe has a minimum tilt angle with respect to a cleaved facet in order to reduce the facet reflectivity. A method for improving the yield of distributed feedback lasers is also provided. The method includes selecting a tilt angle and antireflection coating to achieve a desired effective facet reflectivity. In one embodiment, a range of tilt angles and facet coatings is tested to determine a statistical correlation between yield of a desired laser characteristic, such as side mode suppression ratio, and tilt angle.

REFERENCES:
patent: 20020131465 (2002-09-01), Lo et al.
patent: 20030169787 (2003-09-01), Vurgaftman et al.
“Reflection Loss of Laser Mode From Tilted End Mirror,” by Dietrich Marcuse, IEEE Journal of Lightwave Technology, vol. 7, No. 2, Feb. 1989.

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