Coating processes – Electrical product produced – Welding electrode
Patent
1983-08-29
1985-03-05
Newsome, John H.
Coating processes
Electrical product produced
Welding electrode
118641, 373110, 427 85, 4273722, B05D 306
Patent
active
045030871
ABSTRACT:
A process for high temperature, rapid drive-in diffusion employs a planar blackbody source placed in parallel alignment with a semiconductor wafer in a vacuum processing chamber. The wafer is rapidly heated, preferably to a temperature in the range of 1100.degree. C. to 1300.degree. C. and primarily by radiation which promotes uniformity. Typical diffusions are completed in less than one minute. In order to control diffusion distance at elevated temperatures, the process time and source temperature are carefully controlled, and the peak wafer temperature is monitored.
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Cole Stanley Z.
McClellan William R.
Newsome John H.
Varian Associates Inc.
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