Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state
Patent
1996-08-06
1999-04-20
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
117 88, 117105, 117951, C30B 2936
Patent
active
058955267
ABSTRACT:
A process for growing a single crystal comprises providing a single crystal substrate acting as a seed crystal above a source material in a container, heating the source material in an inert gas atmosphere in the container to form a sublimed source material, and discharging the sublimed source material from the container through a port above the single crystal substrate, to cause the sublimed source material to flow along and in parallel with a surface of the single crystal substrate, and grow a single crystal on the surface of the single crystal substrate.
REFERENCES:
patent: Re34861 (1995-02-01), Davis et al.
patent: 5433167 (1995-07-01), Furukawa et al.
patent: 5441011 (1995-08-01), Takahaski et al.
Kitoh Yasuo
Sugiyama Naohiro
Suzuki Masahiko
Garrett Felisa
Nippondenso Co. Ltd.
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