Process for gettering semiconductor components and integrated se

Electric heating – Metal heating – By arc

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148 15, 219121LF, B23K 2700

Patent

active

043191193

ABSTRACT:
Semiconductor components and integrated semiconductor circuits which are produced in a semiconductor crystal wafer are provided with a getter layer on the back side (opposite the active device side) of a semiconductor crystal wafer by controllably irradiating such back side with laser light pulses.

REFERENCES:
patent: 3556879 (1971-01-01), Mayer
patent: 4149905 (1979-04-01), Levinstein et al.
patent: 4159917 (1979-07-01), Gluck

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