Process for forming sulfide layers by photochemical vapor deposi

Details Process for forming sulfide layers by photochemical vapor deposi Process for forming sulfide layers by photochemical vapor deposi

1982-06-10

1984-05-08

Smith, John D.

Coating processes

Electrical product produced

Welding electrode

427 85, 427 87, 4272552, 4272554, 427255, 427 82, B05D 306, H01L 21205

Patent

active

044474695

ABSTRACT:
The specification discloses a low-temperature process for depositing a layer of a sulfide of a chosen element, such as zinc sulfide, on the surface of a substrate while simultaneously avoiding damage to the substrate. The process comprises exposing the substrate to a selected vapor phase reactant containing the chosen metal, such as dimethyl zinc, in the presence of neutral, charge-free sulfur atoms formed in a manner which avoids the generation of charged particles and high energy radiation that would damage the substrate. The sulfur atoms react with the vapor phase reactant to form the sulfide thereof, such as zinc sulfide, which deposits as a layer on the surface of the substrate. In a preferred process embodiment, the neutral sulfur atoms are generated by photochemical dissociation. In addition, there is disclosed a process for forming a native sulfide layer on the surface of a chosen substrate by exposing the substrate to neutral, charge-free sulfur atoms.

REFERENCES:
patent: 3761308 (1973-09-01), Galli
patent: 3920860 (1975-11-01), Freller et al.
patent: 4181751 (1980-01-01), Hall et al.
patent: 4265932 (1981-05-01), Peters et al.
patent: 4320178 (1982-03-01), Chemla et al.
patent: 4371587 (1983-02-01), Peters

Affiliated with

Also associated with

Rating

Process for forming sulfide layers by photochemical vapor deposi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for forming sulfide layers by photochemical vapor deposi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for forming sulfide layers by photochemical vapor deposi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1602559