Process for forming protective diamond-like carbon coatings on m

Details Process for forming protective diamond-like carbon coatings on m Process for forming protective diamond-like carbon coatings on m

1994-03-18

1995-02-21

Owens, Terry J.

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

427528, 427531, 427533, B05D 306

Patent

active

053914074

ABSTRACT:
Process for forming diamond-like carbon coatings on metal surfaces to produce increased resistance to penetration, abrasion, and corrosion. A Ni/P coating is formed on an uncoated metal workpiece by-electroless deposition. While the workpiece is heated to harden the Ni/P coating, a vaporized stream of silicon is directed onto the Ni/P coating and the stream of silicon over the Ni/P coating is bombarded with an ion beam such that a NiSi.sub.2 layer is formed at the interface of the Ni/P coating and silicon and a silicon overlayer is formed over the NiSi.sub.2 layer. A vaporized stream of carbon-containing precursor molecules is directed onto the silicon overlayer such that a film of the precursor molecules condenses on the silicon overlayer. The film of precursor molecules is bombarded with an ion beam sufficiently to form a layer of diamond-like carbon on the silicon overlayer. A Ni/B solution or Ni/SiC solution can be used instead of the Ni/P solution, and germanium can be used instead of silicon.

REFERENCES:
patent: 4554208 (1985-11-01), MacIver et al.
patent: 4634600 (1987-01-01), Shimizu et al.
patent: 5009923 (1991-04-01), Ogata et al.

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