Process for forming polymeric paraxylylene coatings and films po

Coating processes – Coating by vapor – gas – or smoke

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427248G, 427248H, C23C 1100, C23C 1300

Patent

active

041762096

ABSTRACT:
Polymeric paraxylylene coatings and films possessing significantly improved oxidation resistance, particularly at elevated temperatures, are disclosed as well as a process for their preparation wherein certain antioxidants are vaporized and codeposited with vaporous poly(paraxylylene) precursors onto a substrate.

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