Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-10-24
1991-12-10
Beck, Shrive
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427431, 427 44, 427 82, 427227, 427249, 427250, 4272556, 437225, B05D 306
Patent
active
050716719
ABSTRACT:
A focused ion beam is irradiated on a predetermined area of a substrate on which a film is to be formed, and a vapor stream of film-forming depositable material is directed onto a localized area of the substrate which is being irradiated with the focused ion beam to convert the film-forming material to a film deposit on the predetermined area of the substrate. The process can be used to repair white-spot defects in masks and to otherwise deposit films having sharply defined edges and widths in the submicron range.
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Houjyo Hisao
Kaito Takashi
Nakagawa Yoshitomo
Yamamoto Masahiro
Adams Bruce L.
Bashore Alain
Beck Shrive
Seiko Instruments Inc.
Wilks Van C.
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