Process for forming low thermal expansion pyrolytic nitride coat

Details Process for forming low thermal expansion pyrolytic nitride coat Process for forming low thermal expansion pyrolytic nitride coat

1996-04-02

1999-10-26

Stucker, Jeffrey

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

4272552, 428212, 428688, 428689, 428698, 428699, 428704, 501 96, 501 97, B32B 900, B32B 702, C23C 1600, C04B 3558

Patent

active

059725117

ABSTRACT:
A coated article of a stoichiometric coating composition of pyrolytic PB(Si)N on low thermal expansion carbon, graphite or ceramic materials and process of forming the coated article. The process involves introducing reactant vapors, under appropriate deposition conditions, within a heated furnace chamber containing the article to be coated. The reactant vapors are composed of ammonia, a gaseous source of boron and silicon and a diluent gas and are fed at a gas flow rate such that the combined flow rate of boron and silicon is less than the flow rate of ammonia.

REFERENCES:
patent: 4772304 (1988-09-01), Nakae et al.
patent: 5128286 (1992-07-01), Funayama et al.
Diamond & Related Materials "Preparation of Si-N-B Films by CVD Techniques". . . (1996) 580-583.

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