Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon
Patent
1992-01-30
1997-09-02
Kunemund, Robert
Chemistry of inorganic compounds
Carbon or compound thereof
Elemental carbon
117103, 117929, 204173, C30B 2904
Patent
active
056628773
ABSTRACT:
The present invention improves the adhesive property by pretreating under uniform conditions the substrate surface of metal, ceramics or glass etc. with a poor adhesive property, by accelerating ions under an electric field to the substrate in advance of a diamond-like film forming process. In light of the fact that a diamond-like film forming process by ionized deposition uses thermal electron ionization means and an electric potential is applied to a grid to accelerate ionized hydrocarbon ions, the present invention could attain the aimed purpose by ionizing and then accelerating a bombardment gas such as argon as a pretreatment process in the same apparatus.
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Yoshikatsu Namba, "Diamondline Carbon Films Prepared by Charged Particles," Surface Chemistry, 5, pp. 108-115 (1984).
Nakayama Masatoshi
Shibahara Masanori
Ueda Kunihiro
Kunemund Robert
TDK Corporation
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