Process for forming deposited film and process for producing sem

Details Process for forming deposited film and process for producing sem Process for forming deposited film and process for producing sem

1990-09-25

1992-07-28

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437187, 437189, 437200, H01L 2144, H01L 2148, H01L 2190

Patent

active

051340925

ABSTRACT:
A process for forming a deposited film comprises the steps of;

REFERENCES:
patent: 3816491 (1974-06-01), Wilkinson
patent: 4349408 (1982-09-01), Tarng et al.
Vossen et al., The Film Processes, Academic Press, Inc., NY 1978 pp. 615-617.
M. Diem et al., "Properties & Chemically Vapor-Deposited Tungsten Thin Films on Silicon Wafers", Thin Solid Films, vol. 107, No. 1, pp. 39-43, Sep. 1983.

Affiliated with

Also associated with

Rating

Process for forming deposited film and process for producing sem does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for forming deposited film and process for producing sem, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for forming deposited film and process for producing sem will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1686872