Coating processes – Electrical product produced – Welding electrode
Patent
1986-02-20
1988-10-18
Beck, Shrive
Coating processes
Electrical product produced
Welding electrode
430 57, 430130, 430134, 437241, B05D 306
Patent
active
047786922
ABSTRACT:
A process for forming a deposited film, which comprises introducing into a film forming space for formation of a deposited film on a substrate an active species (A) formed by decomposition of a compound containing silicon and a halogen and an active species (B) formed from a germanium containing compound for film formation which is chemically mutually reactive with said active species (A) separately from each other, and then permitting the above respective active species and said germanium containing compounds to react chemically with each other by excitation by irradiation of light energy thereby to form a deposited film on the above substrate.
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Ishihara Shunichi
Kanai Masahiro
Oda Shunri
Ohno Shigeru
Shimizu Isamu
Beck Shrive
Canon Kabushiki Kaisha
Dang Vi Duong
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