Process for forming complementary integrated circuit devices

Details Process for forming complementary integrated circuit devices Process for forming complementary integrated circuit devices

1982-04-05

1984-03-13

Saba, W. G.

Metal working

Method of mechanical manufacture

Assembling or joining

29576B, 29577C, 29578, 148 15, 148187, 148190, 148191, 357 23, 357 42, 357 52, H01L 2122, H01L 2978

Patent

active

044358954

ABSTRACT:
A process for forming chanstops in complementary transistor integrated circuit devices which involves only a single extra masking step yet permits close control of the doping in the chanstops. The process is advantageously used starting with a twin-tub structure for forming CMOS integrated circuit devices.

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Copending application of L. C. Parrillo-R. S. Payne Case 1-5, Ser. No. 328,150, filed 12/7/81.

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