Process for forming an optical waveguide

Details Process for forming an optical waveguide Process for forming an optical waveguide

1975-10-28

1978-07-11

Gwinnell, Harry J.

Coating processes

Optical element produced

427248R, 427282, 427286, 350 9630, B05D 506, C23C 1108

Patent

active

041003136

ABSTRACT:
A technique for generating long narrow microstructures based upon the shadowing effect of thick slits placed between a source and a substrate. The method is particularly well suited for forming optical waveguides using a mask having a slit with a width larger than the width of the stripe to be deposited and being thick relative to the width of said slit.

REFERENCES:
patent: 2633427 (1953-03-01), Dimmick et al.
patent: 3226255 (1965-12-01), Cieniewicz et al.
patent: 3272175 (1966-09-01), Lorenz et al.
patent: 3374111 (1968-03-01), Brennemann
patent: 3510349 (1970-05-01), Jones
patent: 3799792 (1974-03-01), Ryng
patent: 3822929 (1974-07-01), Heidrich et al.
patent: 3923373 (1975-12-01), Dabby et al.
patent: 3930065 (1975-12-01), Baker et al.
patent: 3936545 (1976-02-01), Brill et al.
patent: 3967365 (1976-07-01), Friedrich
patent: 4037005 (1977-07-01), Phillips
J. of Electronic Materials, vol. 4, No. 3, Jun., 1975, pp. 549-565.

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