Process for forming a thin film and apparatus therefor

Details Process for forming a thin film and apparatus therefor Process for forming a thin film and apparatus therefor

2007-02-27

2007-02-27

Bashore, Alain L. (Department: 1762)

Coating processes

Optical element produced

Transparent base

C427S010000, C427S585000, C427S596000, C427S166000, C427S255700, C118S664000, C118S665000, C118S7230EB, C118S726000, C351S159000, C351S166000, C351S177000, C351S177000, C351S177000, C351S177000, C351S177000

Reexamination Certificate

active

10330131

ABSTRACT:
A process for forming a thin film is described that enables automatic formation of thin films having constant optical properties reliably and in large quantities with excellent reproducibility suitable for mass production. An apparatus for performing the process is also described. Generally, a material for vapor deposition is vaporized by an electron gun and an antireflection film forms by vapor deposition on lenses held by a coat dome. The electric power applied to the electron gun is controlled so that the amount of transmitted or reflected light continuously measured by an optical film thickness meter during thin film formation is compared to a reference amount of measured light stored in a means for storing data until the measured and reference amounts of measured light are close to, or the same as, one another.

REFERENCES:
patent: 2472605 (1949-06-01), McRae et al.
patent: 2771055 (1956-11-01), Kelly et al.
patent: 3892490 (1975-07-01), Uetsuki et al.
patent: 4024291 (1977-05-01), Wilmanns
patent: 4140078 (1979-02-01), Wilmanns
patent: 4837044 (1989-06-01), Murarka et al.
patent: 4999509 (1991-03-01), Wada et al.
patent: 5000575 (1991-03-01), Southwell et al.
patent: 5009485 (1991-04-01), Hall
patent: 5354575 (1994-10-01), Dagenais et al.
patent: 5425964 (1995-06-01), Southwell et al.
patent: 5980975 (1999-11-01), Nomura et al.
patent: 2002/0027665 (2002-03-01), Abe et al.
patent: 2003/0086097 (2003-05-01), Finarov
patent: 0408015 (1991-01-01), None
patent: 1 094 344 (2001-04-01), None
patent: 1094344 (2001-04-01), None
patent: 2001-115260 (2001-04-01), None
patent: 2001-123269 (2001-05-01), None
European Search Report, completed Apr. 21, 2004.

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