Abrading – Abrading process – Glass or stone abrading
Patent
1997-06-16
1999-10-05
Scherbel, David A.
Abrading
Abrading process
Glass or stone abrading
451 56, 451443, 451444, 451 5, 451 21, B24B 5300
Patent
active
059613734
ABSTRACT:
A process for conditioning a polishing pad has been developed that incorporates in-situ conditioning where the conditioning is performed while the substrate (27, 40) is on the polishing pad (22) but terminates before the polishing of the substrate (27, 40) is completed. In one embodiment, ex-situ conditioning of the polishing pad (22) is used on the polishing pad between substrates (27, 40). The process has benefits of both in-situ and ex-situ conditioning.
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Kim Sung C.
Lai Lei Ping
Motorola Inc.
Nguyen George
Scherbel David A.
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