Process for forming a magnetoresistive sensor for a read/write h

Details Process for forming a magnetoresistive sensor for a read/write h Process for forming a magnetoresistive sensor for a read/write h

1996-06-21

1997-04-22

Niebling, John

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

438385, H01L 4300

Patent

active

056228740

ABSTRACT:
A sensor for use in read/writing the magnetic pattern stored in a magnetic storage disk uses a Corbino structure comprising inner and outer electrodes enclosing a magnetoresistive element. The sensor is formed at the front surface of a stack of superposed layers of which the first and fifth are of a high resistivity semiconductive material, the second and fourth are of a magnetoresistive material and the third of a metal or composite structure. The second and fourth layers form a loop around the third layer, the first and fifth form a loop around the second and fourth layers. A dopant is diffused into the front surface of the stack to convert edge portions of the first and fifth layers to low resistivity to form a conductive loop that serves as the outer electrode of the Corbino disk, the third electrode serving as the inner electrode.

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