Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-04-12
2011-04-12
Dougherty, Thomas M (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C204S192180, C204S192200
Reexamination Certificate
active
07923906
ABSTRACT:
A ferroelectric film containing a perovskite type oxide represented by Formula (P) is formed on a substrate, which stands facing a target, by a sputtering technique under conditions of a height of a shield, which surrounds an outer periphery of the target on the substrate side in a non-contact state and comprises shielding layers superposed one upon another at intervals, such that a difference between a plasma potential and a floating potential is at most 35V, and under conditions such that a temperature of the substrate is at least 400° C.:in-line-formulae description="In-line Formulae" end="lead"?(Pb1−x+δMx) (ZryTi1−y)O— (P)in-line-formulae description="In-line Formulae" end="tail"?wherein M represents at least one kind of element selected from Bi and lanthanide elements, 0.05≦x≦0.4, and 0<y≦0.7, the standard composition being such that δ=0, and z=3.
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Arakawa Takami
Fujii Takamichi
Birch & Stewart Kolasch & Birch, LLP
Dougherty Thomas M
FUJIFILM Corporation
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