Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-05-04
1991-01-22
Lowe, James
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427249, 264 81, B05D 108, C23C 1600
Patent
active
049870025
ABSTRACT:
A crystalline diamond film is formed on a thin substrate. Energy is applied by a thermal plasma torch to a gas mixture to deposit carbon particles onto the substrate. The substrate is positioned on a pedestal with a cooling facility in which an intermediate layer of thermally conductive powder is interposed between the substrate and the pedestal.
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patent: 4870672 (1989-09-01), Lindberg
K. Kurihara et al.,"Growth of Diamond by DC Plasma Jet CVD", Electronic Materials, pp. 49-54.
Kotaki Toshiroh
Sakamoto Masakatu
Toshima Hiroaki
Yaguchi Youichi
Fiorilla Christopher A.
Kabushiki Kaisha Kenwood
Lowe James
Namiki Precision Jewel Co. Ltd.
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