Process for filtering electrically charged particles and energy

Details Process for filtering electrically charged particles and energy Process for filtering electrically charged particles and energy

1992-11-30

1994-11-15

Anderson, Bruce C.

Radiant energy

Electron energy analysis

H01J 4700, H01J 4900

Patent

active

053650646

ABSTRACT:
At an energy filter ions are deflected at the entrance side through a first electrostatic field between electrodes (3a', 3b'), traverse through a field-free volume (15) and enter through a shielding (11) into a further electrostatic deflection field between electrodes (7a', 3b'). The axes (A.sub.E, A.sub.A) of the beam entrance and exit are aligned and off-set with respect to the rotation axis (A'.sub.Z) of the cylinder forming the outermost electrode (7a').

REFERENCES:
patent: 3805057 (1974-04-01), Yanagisawa
patent: 4126781 (1978-11-01), Siegel
patent: 4219730 (1980-08-01), Ishikawa et al.
patent: 4758722 (1988-07-01), Leckey et al.
patent: 4769542 (1988-09-01), Rockett
Rev. Sci. Instrum., vol. 44, No. 7, Jul. 1973, pp. 873-876.

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