Process for fault detection on defined structures

Details Process for fault detection on defined structures Process for fault detection on defined structures

1985-07-25

1988-04-26

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

358106, 358101, 356237, G06K 946

Patent

active

047410442

ABSTRACT:
The invention relates to a process for fault detection on structures on surfaces of electrical components or the auxiliary means required to manufacture these components, wherein the actual structure provided in each respective case is scanned with a test beam. In accordance with the invention, provision is made for structure faults or structure deviations to be directly ascertained from sequences of picture points within the scope of an ordinate scanning.

REFERENCES:
patent: 4148065 (1979-04-01), Nakagawa et al.
patent: 4152723 (1979-05-01), McMahon et al.
patent: 4223387 (1980-09-01), Danielsson et al.
patent: 4288782 (1981-09-01), Bader et al.
patent: 4403294 (1983-09-01), Hamada et al.
patent: 4442542 (1984-04-01), Lin et al.
patent: 4479145 (1984-10-01), Azuma et al.
patent: 4651341 (1987-03-01), Nakashima et al.

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