Process for fabrication of fuse and interconnects

Details Process for fabrication of fuse and interconnects Process for fabrication of fuse and interconnects

1978-08-16

1980-04-22

Husar, Francis S.

Metal working

Method of mechanical manufacture

Electrical device making

29578, 357 51, H01H 692

Patent

active

041987446

ABSTRACT:
Fuses and interconnects are fabricated by applying a metallic layer on a substrate and a fusible layer on the metallic layer. Portions of the fusible layer are removed to define discrete fuse elements having a necked portion. Portions of the metallic layer are removed to define interconnects. A portion of the metallic layer coextensive with the necked portion of the fuse elements is removed by selective side etching to form tapering portions separated by a gap without etching of the interconnects. The interconnects are protected from side etching by a separate mask layer or a mask layer used to form the interconnects may be heated to flow down over the sides of the interconnects.

REFERENCES:
patent: 3564354 (1971-02-01), Aoki
patent: 3996551 (1976-12-01), Croson
patent: 4032949 (1977-06-01), Bierig
patent: 4135295 (1979-01-01), Price

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