Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1981-05-08
1983-02-15
Demers, Arthur P.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204192E, H01L 2704
Patent
active
043740111
ABSTRACT:
A method for fabricating insulating regions in an integrated circuit structure is disclosed in which the insulating regions do not encroach upon the surrounding integrated circuit and in which a substantially planar surface across the top of the insulating material and the substrate is created. The method includes the steps of removing portions of the substrate wherever the insulating regions are to be formed, beginning to deposit insulating material across the substrate and in the openings created, and, while continuing to deposit insulating material simultaneously removing insulating material from generally horizontal surfaces and redepositing it on generally vertical surfaces of the substrate and the openings until a planar surface results.
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Rust Werner F.
Vora Madhukar B.
Becker Warren M.
Demers Arthur P.
Fairchild Camera & Instrument Corp.
Olsen Kenneth
Park Theodore S.
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