Metal working – Method of mechanical manufacture – Electrical device making
Patent
1984-12-07
1986-06-03
Hearn, Brian E.
Metal working
Method of mechanical manufacture
Electrical device making
29589, 29591, 29578, 1566611, 357 71, H01L 2147
Patent
active
045921326
ABSTRACT:
Inter-layer electrical shorting between layers of conductors of an integrated circuit caused by "hillocks" in the bottom layer is prevented by the use of a double layer photoresist coatings atop the insulating layer that separates the metal layers. The double layer photoresist insures that irregularities in the dielectric layer caused by hillocks in the underlying insulating layer do not cause a break in the photoresist and a subsequent undesired etching of a spurious "via" through the dielectric layer.
REFERENCES:
patent: 4398964 (1983-08-01), Malwah
patent: 4409319 (1983-10-01), Colacino et al.
patent: 4415606 (1983-11-01), Cynkar et al.
patent: 4517731 (1985-05-01), Khan et al.
patent: 4523975 (1985-06-01), Groves et al.
Bachino, administrator Denise
Clayton, deceased James W.
Lee William W. Y.
Shaw Gareth L.
Auyang Hunter L.
Float Kenneth W.
Hearn Brian E.
Hughes Aircraft Company
Karambelas A. W.
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