Plastic and nonmetallic article shaping or treating: processes – With step of making mold or mold shaping – per se
Reexamination Certificate
2006-09-19
2006-09-19
Kuhns, Allan R. (Department: 1732)
Plastic and nonmetallic article shaping or treating: processes
With step of making mold or mold shaping, per se
C205S070000, C216S002000, C216S011000, C216S053000, C216S057000, C264S293000
Reexamination Certificate
active
07108819
ABSTRACT:
A tool for embossing high aspect ratio microstructures is provided, wherein the microstructures provide decreased surface reflection and increased transmission through an optical component even at high incident angles. The tool is fabricated by a process that comprises anisotropic etching of columnar pits in a silicon substrate using inductively coupled plasma, followed by isotropic reactive ion etching of the columnar pits to create relatively pointed obelisks. The silicon substrate is then preferably rinsed to remove remaining photoresist prior to vapor depositing a conductive layer thereon. Finally, a metal is electroformed over the conductive layer to form the embossing tool. The embossing tool is then pressed against an optical coating, for example a polymer sheet, to create microstructures having aspect ratios from 1 to 5.
REFERENCES:
patent: 4407695 (1983-10-01), Deckman et al.
patent: 4986496 (1991-01-01), Marentic et al.
patent: 5242711 (1993-09-01), DeNatale et al.
patent: 5334342 (1994-08-01), Harker et al.
patent: 5349154 (1994-09-01), Harker et al.
patent: 5384571 (1995-01-01), Myers et al.
patent: 5521030 (1996-05-01), McGrew
patent: 5629074 (1997-05-01), Klocek et al.
patent: 5971326 (1999-10-01), Bechert
patent: 0 205 289 (1992-08-01), None
DeNatale, et al.; “Fabrication and characterizationof diamond moth eye antireflective surfaces on Ge”; J. Appl. Phys. 71 (3), Feb. 1, 1992; pp. 1388-1393.
Motamedi, et al.; “Antireflection surfaces in silicon using binary optics technology”; Applied Optics, vol. 31, No. 22, Aug. 1, 1992, pp. 4371-4376.
Raguin, et al.; “Subwavelength structured surfaces and their applications”; pp. 234-261, undated.
Frank Hartley, Optical surfaces based on arrays of microscopic pillars; NASA's Jet Propulsion Laboratory, pp. 1-2, Jul. 9, 2001.
DeNatale Jeffrey F
Harker Alan B
Strauss Dennis R
Harness & Dickey & Pierce P.L.C.
Kuhns Allan R.
The Boeing Company
LandOfFree
Process for fabricating high aspect ratio embossing tool and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process for fabricating high aspect ratio embossing tool and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for fabricating high aspect ratio embossing tool and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3590702