Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1976-10-26
1977-08-30
Ozaki, G.
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
148187, 148189, H01L 21225
Patent
active
040452590
ABSTRACT:
In a process for fabricating complementary FETS, wherein a first insulative layer has apertures therein, a second insulative layer doped with N-type impurities is formed over the area in which an N channel device is to be formed and is diffused in a non-oxidizing atmosphere through apertures in the first insulative layer to form the source and drain of an N channel device. Immediately thereafter, an atmosphere containing a P-type impurity is introduced to deposit and diffuse P-type impurities through exposed apertures in the first insulative layer to form the source and drain of a P channel device.
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Harris Corporation
Ozaki G.
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