Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Patent
1996-05-15
1998-08-25
Weisstuch, Aaron
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
136244, 136290, 205656, H01L 3118, H01L 3120
Patent
active
057982848
ABSTRACT:
Disclosed is a process for fabricating an array of photovoltaic elements connected in series, which can be used as a high-efficiency solar battery, at low cost and with high reliability. The process for fabricating the array of photovoltaic elements connected in series is characterized in that a step (.alpha.) for forming insulating strips of second electrode material is carried out by immersing in a solution a substrate having a first electrode thereon, and on which the second electrode is deposited, and an opposed electrode of a concentrated electric field type positioned opposite the surface of the second electrode in the vicinity thereof and applying a voltage between the first electrode and the opposed electrode. Further, it is characterized in that a step (.beta.) for electrochemically passivating electrical defect regions in a photovoltaic layer is carried out by immersing in a solution the substrate having a first electrode thereon, and on which the second electrode is deposited, and a flat-plate-shaped opposed electrode positioned opposite the surface of the second electrode and applying a voltage between the first electrode and the opposed electrode. The process is further characterized in that the step .alpha. and the step .beta. are carried out at the same time or in succession independently of each other.
REFERENCES:
patent: 4729970 (1988-03-01), Nath et al.
patent: 5084400 (1992-01-01), Nath et al.
patent: 5320723 (1994-06-01), Kawakami
Canon Kabushiki Kaisha
Weisstuch Aaron
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