Process for fabricating a front surface resonant mesh array dete

Details Process for fabricating a front surface resonant mesh array dete Process for fabricating a front surface resonant mesh array dete

1993-09-13

1995-11-28

Picardat, Kevin M.

Fishing, trapping, and vermin destroying

437 3, 437 4, 437974, 148DIG135, H01L 3116

Patent

active

054707617

ABSTRACT:
A process for fabricating a front surface resonant mesh array detector produces a detector of reduced size. The reduced size results in enhanced responsivity, and minimizes thermal stress between the detector and typical array substrates, enabling fabrication of arrays using front surface resonant mesh array detectors.

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