Process for fabricating a contactless electrical erasable EPROM

Details Process for fabricating a contactless electrical erasable EPROM Process for fabricating a contactless electrical erasable EPROM

1995-06-01

1998-01-13

Chaudhari, Chandra

Fishing, trapping, and vermin destroying

437 45, 437200, H01L 218247

Patent

active

057078840

ABSTRACT:
An improved fabrication process employing relatively non-critical masks permits the fabrication of high density electrically programmable and erasable EEPROM or FLASH-EPROM devices. In practice the novel process permits the fabrication of a contactless, cross-point array providing for a more comfortable "pitch" of bitline metal-definition while realizing a cell layout with a gate structure which extends laterally over adjacent portions of field oxide, thus establishing an appropriate capacitive coupling between control and floating gates. Two alternative embodiments are described.

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