Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-02-05
1999-07-27
Lee, Eddie C.
Photocopying
Projection printing and copying cameras
Step and repeat
355 67, G03B 2742, G03B 2754
Patent
active
059299762
ABSTRACT:
A process for exposing the peripheral area of a wafer and a device for executing the process is provided to enable both step-shaped exposure and also ring-shaped exposure of part of the peripheral area of a wafer using a single arrangement. The device includes a rotary carrier for receiving a wafer having resist thereon, which is moved and rotated based on the position of the wafer on the carrier, the position of a singular point formed on an edge of the wafer, such as an "ori-fla" and the like, and furthermore alignment mark position information, to position the wafer in a stipulated position. Then, using an X-Y carrier, the rotary carrier is moved as exposure light is radiated from a first exit part to expose some of the peripheral area of the wafer in a step shape. Next, the rotary carrier is moved again and rotated, and exposure light emitted from a second exit part to expose a not yet exposed part of the peripheral area of the wafer in a ring-shape. A fiber changeover unit may be positioned and the exposure light introduced into an exit part from a single light source.
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Mimura Yoshiki
Minore Takeshi
Shibuya Isamu
Lee Eddie C.
Nguyen Hung Henry
Safran David S.
Ushiodenki Kabushiki Kaisha
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