Process for etching a metal oxide coating and simultaneous depos

Details Process for etching a metal oxide coating and simultaneous depos Process for etching a metal oxide coating and simultaneous depos

1989-12-08

1992-01-07

Kunemund, Robert

Fishing, trapping, and vermin destroying

437101, 437228, 156667, 156643, 156646, 2041921, 20419229, 2041923, 20419232, 20419235, H01L 2128, H01L 21336

Patent

active

050791788

ABSTRACT:
The process of the invention consists of subjecting a metal oxide coating (106, 108), located on a glass substrate (100), to the action of a gaseous plasma (109) containing 10 to 88% by volume of hydrogen, 2 to 30% by volume of a hydrocarbon and 10 to 50% of an inert vector gas, bringing about the formation of a polymer coating (110) on the parts of the substrate not provided with oxide, by dissocation of the gaseous mixture, and the partial chemical etching of the oxide (106, 108) by the formation of organometallic compounds.

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