Process for dispensing semiconductor die-bond adhesive using a p

Details Process for dispensing semiconductor die-bond adhesive using a p Process for dispensing semiconductor die-bond adhesive using a p

1996-04-29

1997-10-28

Graybill, David E.

Fishing, trapping, and vermin destroying

437212, 437216, 437243, 437249, 437924, 437220, 29 2501, 156295, H01L 2156, H01L 2158, H01L 21603, H01L 2168

Patent

active

056817576

ABSTRACT:
The present invention relates to the process of die bonding semiconductor integrated circuit microchips with adhesive deposited from microjets in a precise pattern. Print-head technology equivalent to that used in inkjet printers is used to apply the adhesive substance (most commonly an epoxy). The use of microjets in an "array printhead" to deposit an adhesive pattern provides advantages in the ability to control the location and size of the adhesive droplets with a high degree of precision. The method also provides for individual actuation of the microjets providing the ability to rapidly change from pattern to pattern without the need to change and clean heads and equipment or to provide multiple heads. The method has application in standard die bonding as well as "flip-chip" processes using "bumped dies." The high degree of precision available allows adhesive to be printed in between the solder bumps of a "bumped die" providing stronger bonding and an underfill without interfering with the electrical connection created by the solder bumps. Also disclosed is a novel method for accomplishing a "flip-chip" process in which the array printhead is used to print conductive epoxy directly on the interconnect pads of the die, replacing the solder bumps of a standard "bumped die." The die is then aligned and placed onto a substrate, with the conductive epoxy serving as both the conductive path and a strong adhesive bonding agent.

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