Process for developing implanted buried layer and/or key locator

Details Process for developing implanted buried layer and/or key locator Process for developing implanted buried layer and/or key locator

1987-04-13

1988-04-12

Roy, Upendra

Fishing, trapping, and vermin destroying

357 91, 437 29, 437 31, 437229, H01L 21265, H01L 2131

Patent

active

047374683

ABSTRACT:
The present invention consists of a process of blanket implanting a key area and buried layer without the use of nitride or thick oxide layers. The key area is then etched leaving the surface of the key area below the surface of the buried layer. Upon growing an epitaxial layer, the key area will be identifiable by a step in the surface of the epi layer.

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patent: 4546534 (1985-10-01), Nicholas
patent: 4573257 (1986-03-01), Hulseweh

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